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Plasma Dry Cleaner

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Plasma Dry Cleaner
  • Plasma Dry Cleaner
Brand: Yamato
Product Code: PDC200
Availability: In Stock
Price: Contact price
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Yamato Plasma Dry Cleaner

Model PDC200/210/510

High performance single stage, compact plasma cleaner suitable for R&D purposes

Features
Simple and compact plasma surface treatment device
RIE (Reactive Ion Etching) Plasma mode, with DP (Direct Plasma) mode as option
Excellent electrode structure for plasma uniformity
Simple touch panel system

Applications
Plasma processing of CSP, BGA, COB substratum
Removal of organic films and metal oxidized films
Dry cleaning of printed circuit board
Surfactant process LED assembly
For R&D

Specifications model: PDC200
Plasma Mode RIE(DP mode is optional)
Electrode Structure Parallel flat stage
RF Power MAX. 300W
Oscillation Frequency 13.56MHz Quartz Oscillator
Display LED touch panel
Chamber Dimensions W400 × D250 × H150mm
Stage Size W250 × D170mm
Chamber Material Aluminium
Reaction Gas 2 systems(Ar, O2)
Purge Gas N2 or Dry air
Reaction Gas Flow Control Flow meter
Vacuum Pump Not included
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
External Dimensions / Weight W540 × D600 × H600mm / Approx. 100kg
Internal dimensions(W×D×H mm) 400×250×150mm
External dimensions(W×D×H mm) 540×600×600mm
Remarks(dimensions) 00
Power Source AC115VV 
Single phase
Weight 100kg

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