TỦ PLASMA CLEANER
Model: PDC200 (RIE mode English Version)
· Plasma Mode: RIE : Reactive Ion Etching
· High-frequency Output: Max.300W
· Oscillating Frequency: 13.56 MHz
· Dimension of Stage: 250×170mm
· Aluminum chamber: Internal dimension: 400mmW×250mmD×150mmH
· Electrode: Parallel flat stage plate: 230mmW×170mmD
· Vacuum gauge: Capacitance manometer
· Reaction gas system: Two systems (Ar,O2)
· Controller: Programmable controller
· Display: LCD Touch panel Display
Radio-Frequency Power Supply
· Input PDC-200: AC 100V,Single phase, 8A (50/60 Hz)
· Radio-frequency output power: PDC-200:300W
· Reference oscillator: Quartz oscillator
· Oscillating frequency: 13.56 MHz
· Matching adjustment: Automatic tuning
Discharge System (Vacuum Pump)
· Displacement: Total 345 liters/min.
· Input power supply: Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase AC100V,4A,(50/60Hz)
· Inlet configuration: NW25
· Outlet configuration: NW25
· Purge gas: Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
· Reaction gas G1: Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm)
· Reaction gas G2: Argon (Ar) and a mass flow controller (100 secm)
Safety Mechanisms, System Protections:
· Watching Vacuum Pump and RF generater
· Watching over current by Thermal Protector Magnetic relay.
· Product Quartz oscillator
· When Matching unit have miss matching,protect quartz oscillator.
· Door Panel Inter lock
· Build Inter lock switch.
Actions against a trouble of the vacuum pump
· The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
· *The main valve closes *The gas feed valve closes *The isolation valve closes *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding *The treatment process timer stops.
BACK TO TOP