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TỦ PLASMA YAMATO PDC200

Brand: Yamato
Product Code: PDC200 (RIE)
Availability: In Stock
Price: Contact price
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TỦ PLASMA CLEANER

Model: PDC200 (RIE mode English Version)

·         Plasma Mode: RIE : Reactive Ion Etching

·         High-frequency Output: Max.300W

·         Oscillating Frequency: 13.56 MHz

·         Dimension of Stage: 250×170mm

 

SPECIFICATIONS:

Main Unit

·         Aluminum chamber: Internal dimension: 400mmW×250mmD×150mmH

·         Electrode: Parallel flat stage plate: 230mmW×170mmD

·         Vacuum gauge: Capacitance manometer

·         Reaction gas system: Two systems (Ar,O2)

·         Controller: Programmable controller

·         Display: LCD Touch panel Display

 

Radio-Frequency Power Supply

·         Input PDC-200: AC 100V,Single phase, 8A (50/60 Hz)

·         Radio-frequency output power: PDC-200:300W

·         Reference oscillator: Quartz oscillator

·         Oscillating frequency: 13.56 MHz

·         Matching adjustment: Automatic tuning

 

Discharge System (Vacuum Pump)

·         Displacement: Total 345 liters/min.

·         Input power supply: Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase AC100V,4A,(50/60Hz)

·         Inlet configuration: NW25

·         Outlet configuration: NW25

 

Gas Systems

·         Purge gas:  Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer

·         Reaction gas G1: Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm)

·         Reaction gas G2: Argon (Ar) and a mass flow controller (100 secm)

 

Safety Mechanisms, System Protections:

·         Watching Vacuum Pump and RF generater

·         Watching over current by Thermal Protector Magnetic relay.

·         Product Quartz oscillator

·         When Matching unit have miss matching,protect quartz oscillator.

·         Door Panel Inter lock

·         Build Inter lock switch.

 

Actions against a trouble of the vacuum pump

·         The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.

·         *The main valve closes *The gas feed valve closes *The isolation valve closes *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding *The treatment process timer stops.

 

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