Plasma Dry Cleaner

Applications
Improvement of adhesiveness of various materials and surface reformation
Light ashing and light etching process
Pre-treatment of implemented board bonding, plastic package and print board plating
Processing of LED related commercial products
Cleaning of electronic parts
Resist peeling or residue removal after wetting process
Cleaning of accuracy parts including optics and optical fibers, or machine parts
Reformation of resin surface including fluoro resin

Specifications model: PDC610
Plasma Mode RIE/DP selectable
Electrode Structure 3-stage independent parallel flat plates
Vacuum Gauge Capacitance manometer
High Frequency Output Max 600W
Oscillation Frequency 13.56MHz Quartz oscillator
Output Setting Method Manual setting on the LCD touch panel
Matching Method Auto tuning
Control Device Sequencer
Display LCD touch panel
Chamber Size WxDxH 350 x 270 x 300 mm
Stage Size W250 x D220mm Three stages
Chamber Material Aluminum
Reactive Gas 2 systems (Argon and Oxygen)
Purge Gas Nitrogen or dry air
Vacuum Pump Rotary vacuum pump (Approx. 345 L/min)
External Dimension WxDxH 600 x 722 x 700 mm
Exterior Material Stainless steel
Power Source 50/60 Hz 3-phase AC200V~AC230V 15A